Ускоренный массоперенос при интенсивной пластической деформации и ионной имплантации
DOI:
https://doi.org/10.54708/26587572_2026_832664Ключевые слова:
Массоперенос, интенсивная пластическая деформация, интенсивная ионная имплантация, металлические сплавы, кислородАннотация
При интенсивной пластической деформации (ИПД) часто наблюдаются фазовые превращения, которые сопровождаются ускоренным массопереносом. В сплавах алюминия, меди и титана при ИПД наблюдалось равновесие между образованием и распадом пересыщенного твердого раствора. При этом происходит ускоренный массоперенос атомов матрицы и растворенного компонента. Были проведены оценки эффективного коэффициента диффузии для такого массопереноса, вызванного ИПД. Обнаружено, что эффективный коэффициент диффузии Deq при ИПД на 8-12 порядков величины превышает значения коэффициента объёмной термической диффузии Dv при температуре ИПД эксперимента (обычно это 300 К). Это связано, по всей видимости, с высоким содержанием дефектов решётки в стационарном состоянии, возникающим при ИПД. Таким образом, величина Deq, наблюдаемая в ходе ИПД при TSPD = 300 К сравнима с величиной Dv при некоторой эффективной температуре Teff, намного превышающей температуру ИПД эксперимента TSPD. Недавно нами была разработана установка для низкоэнергетической сильноточной ионной имплантации в ускорителе с Холловским током. Она, в частности, позволяет проводить имплантацию ионов кислорода и азота с плотностью ионного тока на несколько порядков выше, чем в стандартных методах ионной имплантации. В результате, например, глубина проникновения ионов кислорода в титан при энергии 1 кВ в нашем случае вместо стандартных 20 нанометров составляет около 20 микрометров. По нашему мнению, существует определённое сходство между деформационно-стимулированным и ионно-стимулированным массопереносом в сильно неравновесных условиях.Библиографические ссылки
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