Kamenetskikh АС, Gavrilov НВ, Ershov АА, Tretnikov ПВ. Deposition of thin films of solid electrolyte LiPON in a vapor-gas medium (Li3PO4 /Ar-N2) activated in a low-pressure arc. MTD [Internet]. 2023 Dec. 12 [cited 2024 Jul. 23];5(4 (14):30-41. Available from: http://journal.ugatu.su/index.php/mtd/article/view/3702