Effect of bias voltage during plasma-assisted HF-spraying of AlMgB14 powder target

Abstract

This paper presents the results of the study of coatings of AlMgB14 composition obtained by the method of plasma-assisted HF-application from powder materials. The system consists of a 200 mm diameter target with powder material from which coatings are applied and a gas plasma generator “PINK”. The system allows reducing the pressure of coating application, significantly increasing the speed of coating application and controlling the properties of the applied coatings due to plasma assisted deposition process. The studies were carried out on the COMPLEX electron-ion-plasma surface engineering unit developed in the laboratory of plasma emission electronics of IHCE SB RAS. The coatings of AlMgB14 composition obtained by plasma-assisted HF deposition in vacuum were investigated. All data were obtained for five prototype samples of AlMgB14 composition coatings, one prototype sample of AlMgB14+30%TiB2 composition coating and one prototype sample of AlMgB14+70%TiB2 composition coating.