Features of plasma concentration distribution in gas-metal beam-plasma formations

Abstract

In this paper, the azimuthal distributions of the concentration of charged particles in gas beam-plasma formation and gas-metal beam-plasma formation, as well as in gas and gas-metal plasma in a traditional discharge scheme for vacuum arc plasma-assisted deposition are investigated. The obtained values of the inhomogeneity coefficient for gas-metal beam-plasma formation and plasma formation obtained in a traditional discharge circuit are 81% and 97%, respectively. The average electron temperature in the discharge circuit for generating gas-metallic software is 2.3 eV, and the traditional discharge circuit has an electron temperature of 1.5 eV.